A capacitive differential pressure sensor with polyimide diaphragm
نویسندگان
چکیده
منابع مشابه
Analytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm (RESEARCH NOTE)
Abstract In this paper analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated by use of finite element analysis. The central deflection and capacitance values under uniform external pressure are calcula...
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This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...
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Background. As interest on wearable computing [1] increases, researchers are looking for new materials to use as a support for electronics. A fabric substrate is very appealing: it is elastic and extensible [2], supported by a well known technology and produced at low-cost. State of the art. Some smart pressure-sensors interfacing with a flexible substrate have been developed, but they are eith...
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INTRODUCTION The sense of touch plays an important role in everyday life. It provides the body with early contact to surrounding objects. By touching an object, we can tell if it is sharp or smooth; by holding it, we can estimate its weight. Skin is the most extended sensor of the entire human body. The haptic interface gives the first feedback to object manipulation; without sensing the pressu...
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This paper describes a capacitive absolute-pressure sensor in which the sealed lead transfer is eliminated. The pick-off capacitance is between a flap or skirt-like extension of the flexible diaphragm that reaches past the sealed cavity, and an electrode patterned on the substrate directly below this extension. The sidewall of the cavity is relatively narrow and flexible. Finite-element analysi...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 1997
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/7/3/046